aep Technology - We bring solutions to you.
 
Products
 

NanoMap 500LSST80


In-situ Stress Monitor


ST80 is an innovative surface curvature measurement apparatus that is capable of measuring surface radius of curvature in situ for a variety of applications. By employing the Stoney equation with known substrate material properties, the film stress can be calculated to provide real time process monitoring and diagnostics.
   
Features Contact Us to schedule a demonstration
  • Surface curvature measurement precision:

    10-3 [1/m] (1sigma)
    (eq. R = 1 km)
  • Measurement accuracy:

    +/-2% or +/-10-2 [1/m]
   
Specifications
  • Maximum curvature: Cmax= 0.1[1/m] or Rmin= 10 [m]
  • Minimum specimen size: f40mm or 30mm X 30mm
  • Data update rate: 1 Hz
  • Surface reflectivity range: 2% ~ 100%
  • Surface reflectivity accuracy and precision: 2%
  • Sensor head dimension: 8"W X 8"L X 6"H
  • Max distance between sensor and controller: 15'
  • Input voltage rating: 12V or Battery pack
  • Power Consumption: 1 Watt
  • Overall Weight: 8 lbs
   


Contact Us to Schedule a Demonstration!