Step Height with sub angstrom resolution

Several processes require step height measurements with a high degree of repeatability and accuracy. AEP profilers—contact and/or optical based profilers, are used to do the same.

Following are recommendations for choice of technique

Optical Profilometer NanoMap-O

• Both below mentioned modes present on same
  module as a part of basic package.
• Scanning white light /coarse mode for
  10mm > Step heights > 150nm.
• Phase shift/fine mode—Step heights < 150nm.

Contact Profilometer NanoMap-LS

• Measures step height upto 500 microns (0.5mm) with high spatial resolutions.
• More effective than optical profilometer on samples with larger slopes or on material with unknown optical constants. Its also more effective on dirty samples.

Contact + Optical Profilometer NanoMap-D

• Model NanoMap has both Contact and Optical profilometer on same platform. It can be used to measure step height of ANY kind sample—thin , thick, dirty, non flat etc. Range nm to 10mm.